Ultrathin Crystalline Silicon Nano and Micro Membranes with High Areal Density for Low‐Cost Flexible Electronics (Small 39/2023)

Micro- and Nano-Electronics Group

Ultrathin silicon membranes for wearable dialysis.

The development of wearable or implantable technologies that replace center-based hemodialysis (HD) hold promise to improve outcomes and quality of life for patients with ESRD. A prerequisite for these technologies is the development of highly efficient membranes that can achieve high toxin clearance in small-device formats. Here we examine the application of the porous nanocrystalline silicon ...

Fast flexible electronics with strained silicon nanomembranes

Fast flexible electronics operating at radio frequencies (>1 GHz) are more attractive than traditional flexible electronics because of their versatile capabilities, dramatic power savings when operating at reduced speed and broader spectrum of applications. Transferrable single-crystalline Si nanomembranes (SiNMs) are preferred to other materials for flexible electronics owing to their unique a...

Thin Flexible Crystalline Silicon for Photovoltaics

Preliminary results of a Silicon-On-Insulator to polymer transfer technique capable of producing large area flexible crystalline silicon layer of thicknesses between 0.4 and 2.0 μm, are presented. Formation of a shallow pn junction using ion implantation of Phosphorus was confirmed through capacitance-voltage measurements with further analysis of these results revealing a sharp junction definit...

Versatile ultrathin nanoporous silicon nitride membranes.

Single- and multiple-nanopore membranes are both highly interesting for biosensing and separation processes, as well as their ability to mimic biological membranes. The density of pores, their shape, and their surface chemistry are the key factors that determine membrane transport and separation capabilities. Here, we report silicon nitride (SiN) membranes with fully controlled porosity, pore g...